pecvd wafer boat assemblies - entegris

MEMS Techanology full seminar report

The PECVD process can operate at lower temperatures (down to 300 C) thanks to the extra energy supplied to the gas molecules by the plasma in the reactor. However, the quality of the films tend to be inferior to processes running at higher temperatures.

WAFER HANDLING AUTOMATION

ucts. The Liberty Elite 3-Stage transfer system allows a user to manually place (1) wafer cassette onto the sys-tem for loading, add another boat of 25 wafers and finally load all 50 wafers into a single SiC boat. Unloading is achieved in the same manor. This unit also

Temperature Dependence of Morphologies of Aligned

Silicon oxide nanowire assemblies with fishbonelike, gourdlike, spindlelike, badmintonlike, and octopuslike morphologies were synthesized by the chemical vapor deposition of silane at 1150 C with molten gallium as the catalyst via a vapor−liquid−solid process. The morphologies of the nanowire assemblies were temperature-dependent so that within a specific temperature range nanowire

Sapphire (Al2O3)

This technique can also provide unique shapes and sealed assemblies. By Stepanov method, ribbon crystals up to 500 mm long and 80 mm wide are grown. Crystals grown by this method can have different crystallographic orientations (A, R, random) and are mainly used for industrial mechanical applications, where good optical qualities are not important.

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Our R2D automation equipment includes mass wafer transfer systems, sorters, long-boat transfer systems, load station elevators, buffers and conveyers. We use vacuum technology in our Standalone and our Full Automation solar wafer transfer systems designed to ensure high throughput, reduced breakage and thereby increased yield.

Annual Report (10

Our R2D automation equipment includes batch wafer transfer systems, sorters, long-boat transfer systems, load station elevators, buffers and conveyers. We use vacuum technology in our Standalone and our Full Automation wafer transfer systems designed to ensure high throughput and reduced breakage, resulting in increased yield.

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the optimum gasket material for your requirements. To the product finder Brochures, technical data and information sheets as well as approvals and test reports on our SIGRAFLEX products can be found in our [] tapes, gasket sheets for motor vehicle high-temperature sealing, automotive, truck, exhaust, gasket, EGRWe offer a broad range of SIGRAFLEX flexible graphite foil, tape and gasket

Society of Vacuum Coaters

2010 SVC TechCon Exhibitor Locator This is the Only Exhibit Devoted to Vacuum Coating Exhibit Hours: Tuesday, April 20, 2010 • 12:00 p.m. – 6:00 p.m. Wednesday, April 21, 2010 • 10:00 – 5:00 p.m. Admission is Free for Visitors to the Exhibit! View the

Annual Report (10

Our R2D automation equipment includes batch wafer transfer systems, sorters, long-boat transfer systems, load station elevators, buffers and conveyers. We use vacuum technology in our Standalone and our Full Automation wafer transfer systems designed to ensure high throughput and reduced breakage, resulting in increased yield.

Industrial Material Solutions

Premiu Graphit an Silico Carbid Entegris Inc. 3 OVERVIEW — Entegris' POCO Materials, including a variety of specialty graphite and silicon carbide materials, are routinely used in a wide range of highly technical industrial applications. We are well known for

MEMS Techanology full seminar report

The PECVD process can operate at lower temperatures (down to 300 C) thanks to the extra energy supplied to the gas molecules by the plasma in the reactor. However, the quality of the films tend to be inferior to processes running at higher temperatures.

WAFER HANDLING AUTOMATION

ucts. The Liberty Elite 3-Stage transfer system allows a user to manually place (1) wafer cassette onto the sys-tem for loading, add another boat of 25 wafers and finally load all 50 wafers into a single SiC boat. Unloading is achieved in the same manor. This unit also

Society of Vacuum Coaters

Welcome to the 2009 SVC TechCon Exhibit This is the Only Exhibit Devoted Entirely to Vacuum Coating Exhibit Hours:Monday, May 11, 20093:00 p.m. ndas Alcatel manufactures a complete range of Adixen TM brand products including dry vacuum pumps and dry pumping systems, rotary vane pumps, ceramic bearing turbomolecular pumps, full 5 axis maglev turbomolecular pumps, molecular drag pumps,

Annual Report (10

Our R2D automation equipment includes batch wafer transfer systems, sorters, long-boat transfer systems, load station elevators, buffers and conveyers. We use vacuum technology in our Standalone and our Full Automation wafer transfer systems designed to ensure high throughput and reduced breakage, resulting in increased yield.

Ceramic spacer assembly for ASM PECVD boat

A boat assembly for supporting a wafer in a plasma enhanced chemical vapor deposition (PECVD) apparatus, comprising: a support rod having a first diameter; a planar electrode which has a hole of a second diameter that is larger than said first diameter formed therethrough and includes structure for supporting said wafer; and

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Graphite boat assemblies for liquid phase epitaxy (LPE) If requested, LPE boats can be coated with pyrolytic graphite. Boat assemblies for LPE 16 Graphite components for ion implantation equipment Graphite for ion implantation Fine-grained high-density graphites exhibit very low erosion, even in extreme working conditions as in ion bombardment or in plasma.

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the optimum gasket material for your requirements. To the product finder Brochures, technical data and information sheets as well as approvals and test reports on our SIGRAFLEX products can be found in our [] tapes, gasket sheets for motor vehicle high-temperature sealing, automotive, truck, exhaust, gasket, EGRWe offer a broad range of SIGRAFLEX flexible graphite foil, tape and gasket

Solar cell

Manufacturers of wafer-based cells responded to high silicon prices in 2004–2008 with rapid reductions in silicon consumption. In 2008, according to Jef Poortmans, director of IMEC 's organic and solar department, current cells use 8–9 grams (0.28–0.32 oz) of silicon per watt of power generation, with wafer thicknesses in the neighborhood of 200 microns .

Amtech Systems Inc (ASYS) Divisions, Quarterly Segment

We also offer furnace automation and wafer handling systems used within the diffusion processing step of solar cell manufacturing. Our automation equipment includes mass wafer transfer systems, sorters, long-boat transfer systems, load station elevators, buffers and conveyers, which we sell both in connection with our diffusion furnaces and on a standalone basis.

Symposium G

The 55 kHz PECVD allows to increase sufficiently hydrogenated amorphous silicon thin film growth rate in comparison with commonly used 13.56 MHz PECVD what is important in many cases. In spite of inhomogenious structure a-Si:H films formed by this method have good electronic properties and high photoconductivity.

Sapphire (Al2O3)

This technique can also provide unique shapes and sealed assemblies. By Stepanov method, ribbon crystals up to 500 mm long and 80 mm wide are grown. Crystals grown by this method can have different crystallographic orientations (A, R, random) and are mainly used for industrial mechanical applications, where good optical qualities are not important.

Handling Ultra

Thinned wafer attached onto a mobile electrostatic carrier and placed in a standard quartz boat. Click here to enlarge image Several applications of mobile electrostatic carriers for thin wafer processing have already been tested and have proven the technical potential of this new carrier concept.Plasma processes at the backside of thin wafers are an interesting application example.

Products for semiconductor front end processes

Baffle Assemblies Customer specified slotting is available on both half or standard size baffle boats. Boats can be specified for 100 mm, 125 mm, 150 mm or 200 mm wafer size. Standard half boat baffles are available with 3 baffle wafer slots or with 3 baffle wafer

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Our R2D Automation equipment includes mass wafer transfer systems, sorters, long-boat transfer systems, load station elevators, buffers and conveyers. We use a vacuum technology in our Comet Standalone and our Comet Full Automation solar wafer transfer systems designed to ensure high throughput, reduced breakage and thereby increased yield.

Semiconductor Wafer Boat Patents and Patent Applications

Search for Semiconductor Wafer Boat Patents and Patent Applications (Class 206/832) Filed with the USPTO Abstract: A method for batch brazing in a diffusion furnace includes inserting a plurality of fusible parts into a plurality of slots of at least one quartz boat, transporting the at least one quartz boat, including the fusible parts, into an interior of a reaction chamber of the diffusion

WAFER HANDLING AUTOMATION

ucts. The Liberty Elite 3-Stage transfer system allows a user to manually place (1) wafer cassette onto the sys-tem for loading, add another boat of 25 wafers and finally load all 50 wafers into a single SiC boat. Unloading is achieved in the same manor. This unit also

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